Patent · US Active

Piezo-resistive MEMS resonator

US9017561B2 · kind B2 · utility

0Cited by

2References

13Claims

0Family size

Assignee

NXP B.V. · NL

Inventors

Gerhard Koops · Aalst, BE
Jozef Thomas Martinus van Beek · Rosmalen, NL

Key dates

Filing date	Aug 28, 2013
Grant date	Apr 28, 2015
Priority date	—
Expiry date	Aug 28, 2033

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/42
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

A piezo-resistive MEMS resonator comprising an anchor, a resonator mounted on the anchor, an actuator mounted to apply an electrostatic force on the resonator and a piezo-resistive read-out means comprising a nanowire coupled to the resonator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.