Methods of forming molybdenum sputtering targets

US9017600B2 · kind B2 · utility

Assignee

• H.C. STARCK INC. · US

Inventors

• Brad Lemon · Battle Creek, US
• Joseph Hirt · Cypress, US
• Timothy Welling · Portage, US
• James G. Daily, III · Marshall, US
• David Meendering · Coldwater, US
• Gary Alan Rozak · Akron, US
• Jerome O'Grady · Hudson, US
• Prabhat Kumar · Framingham, US
• Steven A. Miller · Pinellas Park, US
• Rong-Chein Richard Wu · Taipei, TW
• David G. Schwartz · Mentor, US

Key dates

• Filing date: Mar 25, 2013
• Grant date: Apr 28, 2015
• Expiry date: Oct 31, 2033

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B22F2998/10
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

In various embodiments, planar sputtering targets are produced by forming a billet at least by pressing molybdenum powder in a mold and sintering the pressed powder, working the billet to form a worked billet, heat treating the worked billet, working the worked billet to form a final billet, and heat treating the final billet.