Showerhead electrode assembly in a capacitively coupled plasma processing apparatus
US9018022B2 · kind B2 · utility
2Cited by
17References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 24, 2012 |
| Grant date | Apr 28, 2015 |
| Priority date | — |
| Expiry date | May 28, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/334
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A showerhead electrode assembly for use in a capacitively coupled plasma processing apparatus comprising a heat transfer plate. The heat transfer plate having independently controllable gas volumes which may be pressurized to locally control thermal conductance between a heater member and a cooling member such that uniform temperatures may be established on a plasma exposed surface of the showerhead electrode assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.