Micro-electro-mechanical-system device with guard ring and method for making same
US9018718B2 · kind B2 · utility
1Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2009 |
| Grant date | Apr 28, 2015 |
| Priority date | — |
| Expiry date | Feb 9, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/302
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention discloses a MEMS device with guard ring, and a method for making the MEMS device. The MEMS device comprises a bond pad and a sidewall surrounding and connecting with the bond pad, characterized in that the sidewall forms a guard ring by an etch-resistive material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.