Patent · US Active

Method of producing optical MEMS

US9018724B2 · kind B2 · utility

2Cited by

9References

19Claims

0Family size

Assignee

AdvancedMEMS LLP · US

Inventors

Albert Ting · San Jose, US
Daniel T. McCormick · Richmond, US
Michael Rattner · Santa Clara, US

Key dates

Filing date	Mar 28, 2008
Grant date	Apr 28, 2015
Priority date	—
Expiry date	Mar 28, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/3025
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method and apparatus for constructing MEMS devices is provided which employs a low cost molded housing that simultaneously provides precise and accurate alignment, mechanical protection, electrical connections and structural integrity for mounting optical and MEMS components. The package includes a MEMS die mounting surface, an optical component mounting surface and an optical imaging window monolithically fabricated with the MEMS die mounting surface in a predetermined orientation for providing alignment between the MEMS die and optical components. A MEMS adaptor plate is provided to facilitate connections of a MEMS die to external components.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.