Light sensors having dielectric optical coating filters
US9024404B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2014 |
| Grant date | May 5, 2015 |
| Priority date | — |
| Expiry date | Jul 31, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0272
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Light sensors including dielectric optical coatings to shape their spectral responses, and methods for fabricating such light sensors in a manner that accelerates lift-off processes and increases process margins, are described herein. In an embodiment, a light sensor includes a photodetector sensor region formed in a semiconductor substrate, a dielectric optical coating filter covering the photodetector sensor region, and dummy dielectric optical coating features beyond the photodetector sensor region, wherein the dummy dielectric optical features include one or more dummy corners, dummy islands and/or dummy rings. Alternatively, or additionally, the dielectric optical coating filter includes chamfered corners, which improves the thermal reliability of the dielectric optical coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.