Actuator including magnet for a projection exposure system and projection exposure system including a magnet

US9025128B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Armin Werber · Gottenheim, DE
• Norbert Muehlberger · Prien am Chiemsee, DE
• Almut Czap · Aalen, DE
• Juergen Fischer · Adelsheim, DE

Key dates

• Filing date: Aug 2, 2011
• Grant date: May 5, 2015
• Expiry date: Dec 14, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01F7/1638
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The present disclosure relates to an actuator for projection exposure systems that include a magnet. The magnet is encapsulated and/or supported in a magnet holding plate that is produced by microtechnical production methods so that a moving manipulator surface is held in the magnet holding plate via monolithic or bonded connections without additional connecting material so that there is a secure connection.