Tunable humidity sensor with integrated heater
US9027400B2 · kind B2 · utility
8Cited by
51References
18Claims
0Family size
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Key dates
| Filing date | Dec 2, 2011 |
| Grant date | May 12, 2015 |
| Priority date | — |
| Expiry date | Apr 15, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/223
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive humidity sensor includes a first electrode, a humidity sensitive dielectric layer, and a second electrode. The humidity sensitive dielectric layer is between the first and the second electrodes. The humidity sensitive dielectric layer is etched at selected regions to form hollow regions between the first and second electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.