Method for producing a device comprising cavities formed between a suspended element resting on insulating pads semi-buried in a substrate and this substrate
US9029178B2 · kind B2 · utility
5Cited by
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14Claims
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Assignee
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Key dates
| Filing date | Nov 8, 2012 |
| Grant date | May 12, 2015 |
| Priority date | — |
| Expiry date | Nov 8, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/01
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for producing a device including plural cavities defined between a substrate in at least one given semiconductor material and a membrane resting on a top of insulating posts projecting from the substrate, the method allowing a height of the cavity or cavities to be adapted independently of a height of the insulating posts and allowing cavities of different heights to be formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.