Patent · US Active

Variable pressure four-point coated probe pin device and method

US9030219B2 · kind B2 · utility

0Cited by

6References

19Claims

0Family size

Assignee

KLA-TENCOR CORPORATION · US

Inventors

Walter H. Johnson · Salem, US
Nanchang Zhu · Shanghai, CN

Key dates

Filing date	Feb 27, 2013
Grant date	May 12, 2015
Priority date	—
Expiry date	Aug 30, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/06705
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A variable pressure probe pin device, including: a housing with a channel having a first longitudinal axis; a probe at least partially disposed in the channel and including a plurality of probe pins configured to measure a property of a conductive layer; and a fluid pressure system configured to supply pressurized fluid o the channel to control a position of the probe within the channel. The housing or the probe is displaceable such that the plurality of probe pins contact the conductive layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.