Systems and methods for managing material storage vessels having information storage elements

US9031683B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• Scott Elfstrom · Maplewood, US
• Kathleen L. Hanson · Savage, US
• Steven E. Haumersen · Woodbury, US
• Thomas D. Johnson · Poplar Grove, US
• Clari Nolet · Los Altos, US
• William Smeaton · Edina, US

Key dates

• Filing date: Jul 10, 2007
• Grant date: May 12, 2015
• Expiry date: Jul 13, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P80/40
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.