Four-axis four-subdividing interferometer

US9036154B2 · kind B2 · utility

Assignees

• Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences · CN
• SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD · CN

Inventors

• Zhaogu Cheng · Shanghai, CN
• Jianfang Chen · Shanghai, CN
• Ya Cheng · Shanghai, CN
• Huijie Huang · Shanghai, CN
• Feng Chi · Shanghai, CN

Key dates

• Filing date: Jan 10, 2014
• Grant date: May 19, 2015
• Expiry date: Jan 10, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B2290/70
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Four-axis four-subdividing interferometer comprising a four-axis light splitting module and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser. The four-axis light splitting system comprises three 50% plane beam splitters and three 45-degree plane reflecting mirrors. The invention comprises a four-axis four-subdividing plane mirror interferometer and a four-axis four-subdividing differential interferometer. In the differential interferometer, an adjustable 45-degree reflecting mirror is used to guide the reference light to a reference reflecting mirror which is arranged in the same direction as a measurement mirror and fixed on the moving object.