Patent · US Active

Six-axis four-subdividing interferometer

US9036155B2 · kind B2 · utility

0Cited by

5References

6Claims

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Assignees

Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences · CN
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD · CN

Inventors

Jianfang Chen · Shanghai, CN
Zhaogu Cheng · Shanghai, CN
Ya Cheng · Shanghai, CN
Huijie Huang · Shanghai, CN
Feng Chi · Shanghai, CN

Key dates

Filing date	Jan 10, 2014
Grant date	May 19, 2015
Priority date	—
Expiry date	Jan 10, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01B2290/70
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Six-axis four-subdividing interferometer comprising a six-axis light splitting system and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser, wherein the six-axis light splitting system comprises five 45-degree plane beam splitters and four 45-degree full-reflecting mirrors.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.