Patent · US Active

Device for scanning an object, method for operating the device and scanning microscope

US9036232B2 · kind B2 · utility

3Cited by

3References

12Claims

0Family size

Assignee

LEICA MICROSYSTEMS CMS GMBH · DE

Inventors

Holger Birk · Meckesheim, DE
Bernd Widzgowski · Dossenheim, DE

Key dates

Filing date	Jan 3, 2011
Grant date	May 19, 2015
Priority date	—
Expiry date	Sep 18, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG02B26/0875
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The invention relates to a device for scanning an object comprising a carrier body (10) and a first electromagnetic drive (2). The carrier body (10) is movably mounted in a plane and holds an optical element (12) that focuses an illuminating light beam (19) on a first object plane of the object that is parallel to the plane. The first electromagnetic drive (2) moves the carrier body (10) with the optical element (12) and a focus region (23) of the illuminating light beam (19) within the first object plane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.