Planar cavity MEMS and related structures, methods of manufacture and design structures
US9041128B2 · kind B2 · utility
30Cited by
35References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 15, 2013 |
| Grant date | May 26, 2015 |
| Priority date | — |
| Expiry date | Feb 15, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/5313
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A Micro-Electro-Mechanical System (MEMS). The MEMS includes a lower chamber with a wiring layer and an upper chamber which is connected to the lower chamber. A MEMS beam is suspended between the upper chamber and the lower chamber. A lid structure encloses the upper chamber, which is devoid of structures that interfere with a MEMS beam. The lid structure has a surface that is conformal to a sacrificial material vented from the upper chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.