Scanning microscope having an adaptive scan
US9041793B2 · kind B2 · utility
5Cited by
5References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 17, 2012 |
| Grant date | May 26, 2015 |
| Priority date | — |
| Expiry date | Aug 2, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2813
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of using a scanning microscope to rapidly form a digital image of an area. The method includes performing an initial set of scans to form a guide pixel set for the area and using the guide pixel set to identify regions representing structures of interest in the area. Then, performing additional scans of the regions representing structures of interest, to gather further data to further evaluate pixels in the regions, and not scanning elsewhere in the area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.