Device for supporting substrate and examiner for seal pattern of LCD cell using the same
US9046716B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 19, 2008 |
| Grant date | Jun 2, 2015 |
| Priority date | — |
| Expiry date | Oct 3, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C13/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed are a substrate support apparatus and an apparatus for examining the seal pattern of an LCD cell. The substrate support apparatus includes a movable stage provided with drawing nozzles for attaching a substrate to an upper surface and adapted to rotate by a predetermined angle; a fixed stage spaced from the movable stage and provided with floating nozzles for ejecting air upward and drawing nozzles for drawing air downward; and a driving device coupled to the movable stage to rotate the movable stage. The apparatus for examining the seal pattern of an LCD cell includes the substrate support apparatus; and a gantry unit including support platforms positioned on both sides of the substrate support apparatus, a bridge positioned above the substrate support apparatus to connect the support platforms, and a correction device coupled to the bridge to examine and repair a seal pattern of a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.