Optical element unit for exposure processes having sealing element

US9046795B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Tilman Schwertner · Aalen, DE
• Ulrich Bingel · Michelfeld, DE
• Guido Limbach · Aalen, DE
• Julian Kaller · Oberkochen, DE
• Hans-Juergen Scherle · Aalen, DE
• Jens Kugler · Heubach, DE
• Dirk Schaffer · Jena, DE
• Bernhard Gellrich · Aalen, DE

Key dates

• Filing date: Mar 11, 2008
• Grant date: Jun 2, 2015
• Expiry date: Aug 4, 2030

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical element unit includes a first optical element module and a sealing arrangement. The first optical element module occupies a first module space and includes a first module component of a first component type and an associated second module component of a second component type. The first component type is optical elements and the second component type being different from the first component type. The sealing arrangement separates the first module space into a first space and a second space and substantially pre-vents, at least in a first direction, the intrusion of substances from one of the first space and the second space into the other one of the first space and the second space. The first module component at least partially contacts the first space and, at least in its area optically used, not contacting the second space. The second module component at least partially contacts the second space.