Stylus abrasion detection method and surface property measurement device
US9052182B2 · kind B2 · utility
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5Claims
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Key dates
| Filing date | Jun 27, 2011 |
| Grant date | Jun 9, 2015 |
| Priority date | — |
| Expiry date | Mar 21, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A stylus abrasion detection method includes obtaining a measurement curve of a standard specimen in which an unevenness that changes periodically is formed on a surface, by causing a stylus to trace along the surface of the standard specimen, detecting a displacement of the stylus in a direction perpendicular to the tracing direction, and using the displacement for obtaining the measurement curve; performing a frequency analysis on the measurement curve; calculating an abrasion amount of the stylus from a result of the frequency analysis; and displaying the abrasion amount calculated by the abrasion amount calculation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.