Electrodeposition method with analysis of the electrolytic bath by solid phase extraction

US9057145B2 · kind B2 · utility

Assignee

• Atotech Deutschland GmbH & Co. KG · DE

Inventors

• Jürgen Barthelmes · Berlin, DE
• Robert Rüther · Hemmingen, DE
• Florence Lagorce-Broc · Berlin, DE
• Olaf Kurtz · Berlin, DE
• Oleg Sprenger · Berlin, DE
• Marta Sainz-Vila · Berlin, DE
• Thomas Moritz · Berlin, DE
• Josef Gaida · Berlin, DE

Key dates

• Filing date: Dec 10, 2007
• Grant date: Jun 16, 2015
• Expiry date: Jun 19, 2031

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C25D21/14
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method for electrodepositing a metal layer from an electrolytic bath is described, wherein the concentrations of at least two components of the electrolytic bath are monitored by carrying out the following steps: (a) a sample is taken from the electrolytic bath; (b) the sample is supplied to a column for solid phase extraction, which contains a solid sorbent material; (c) the column is subjected to a washing procedure with a first eluent, wherein the at least two components remain on the column, and undesired components are eluted from the column; (d) the at least two components are eluted from the column by a second eluent; (e) the concentrations of the at least two components in the eluate obtained in step (d) are determined without separating the components from each other. In this method the use of poly(divinyl benzene-co-N-vinyl pyrrolidone) for solid phase extraction is particularly advantageous.