Probe-based data collection system with adaptive mode of probing

US9057740B1 · kind B1 · utility

Assignee

• DCG Systems, Inc. · US

Inventors

• Vladimir A. Ukraintsev · Allen, US
• Richard Stallcup · Frisco, US
• Sergiy Pryadkin · Plano, US
• Mike Berkmyre · Allen, US
• John Sanders · Ramona, US

Key dates

• Filing date: Dec 16, 2013
• Grant date: Jun 16, 2015
• Expiry date: Dec 16, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2583
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A system for analyzing a sample is described. The system for analyzing a sample includes a probe and a controller circuit. The controller circuit configured to control a movement of the probe to at least a first position and a second position on the sample based on navigation data. In response to the movement of the probe, the controller circuit is configured to adjust a force of the probe on the sample at the first position from a first force value to a second force value and the force of the probe on the sample from a third force value to a fourth force value at said second position on the sample. And, the controller circuit is configured to acquire sample data with the probe at the first position on the sample.