Modular flow cell and adjustment system
US9059223B2 · kind B2 · utility
5Cited by
4References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 11, 2008 |
| Grant date | Jun 16, 2015 |
| Priority date | — |
| Expiry date | Jan 19, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/00585
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A combinatorial processing system having modular dispense heads is provided. The modular dispense heads are disposed on a rail system enabling an adjustable pitch of the modular dispense heads for the combinatorial processing. The modular dispense heads are configured so that sections of the modular dispense heads are detachable in order to accommodate various processes through a first section without having to completely disconnect and re-connect facilities to a second section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.