Substrate treatment apparatus
US9059226B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 8, 2012 |
| Grant date | Jun 16, 2015 |
| Priority date | — |
| Expiry date | Oct 15, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67766
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The substrate treatment apparatus includes a first substrate transport robot having a hand which holds a substrate, a second substrate transport robot having a hand which holds the substrate, and a hand cleaning unit which cleans the hand of the first substrate transport robot and the hand of the second substrate transport robot. The hand cleaning unit is configured to be accessible by the hand of the first substrate transport robot and the hand of the second substrate transport robot, and is disposed above or below a substrate transfer place at which the substrate is transferred between the first and second substrate transport robots.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.