Apparatus and method for examining a specimen by means of probe microscopy

US9063335B2 · kind B2 · utility

Assignee

• JPK INSTRUMENTS AG · DE

Inventors

• Gunnar Sommer · Berlin, DE
• Jörn Kamps · Berlin, DE

Key dates

• Filing date: Aug 20, 2007
• Grant date: Jun 23, 2015
• Expiry date: Oct 16, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/002
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention relates to an apparatus and a method for examining a specimen by means of probe microscopy, in particular scanning probe microscopy. The apparatus comprises a probe microscope device which has a specimen holder for holding a specimen to be examined, a measurement probe and a displacement unit which is configured to displace the specimen holder and the measurement probe relative to one another for an examination of the specimen by means of probe microscopy, and comprises a condenser illumination and also an optical system which is arranged downstream of the condenser illumination and is configured to project condenser light, which is emitted by the condenser illumination in a condenser light path, into the region of the specimen holder for optical microscopy of the specimen to be examined, while at least partially maintaining condenser light parameters with which the condenser light is emitted by the condenser illumination.