Coating agent for forming fine pattern
US9063430B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2014 |
| Grant date | Jun 23, 2015 |
| Priority date | — |
| Expiry date | Jul 9, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC09D129/04
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A coating agent for forming a fine pattern and a method for forming a fine pattern using the coating agent, in which the coating agent allows a resist pattern to be favorably fined, and can form a fined pattern having a suppressed deviation of CD. A coating agent for forming a fine pattern including (A) a water-soluble polymer is combined with a compound in which the compound has an alkyl group having 8 or more carbon atoms bound to a nitrogen atom, and is combined with 4 moles or more of ethylene oxide and/or propylene oxide with respect to 1 mole of a nitrogen atom bound with the alkyl group as (B) a nitrogen-containing compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.