Stamper and method of manufacturing bit patterned medium using stamper
US9064522B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 29, 2014 |
| Grant date | Jun 23, 2015 |
| Priority date | — |
| Expiry date | Jan 29, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C2033/426
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A stamper of an embodiment includes: a base portion having a main surface; and a plurality of guides arranged on the main surface in mutually different first and second directions and serving as references of arrangement of a plurality of self-assembled dots. A distance between the guides in a third direction is within a range of an integer m1 ±0.05 times of a pitch of the plural self-assembled dots. The third direction corresponds to a third vector obtained by combining a first vector corresponding to the arrangement of the guides in the first direction and a second vector corresponding to the arrangement of the guides in the second direction. A distance between the plural guides in the first direction falls out of a range of an integer m2 ±0.15 times of the pitch of the plural self-assembled dots.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.