Method and structure of an integrated MEMS inertial sensor device using electrostatic quadrature-cancellation

US9075079B2 · kind B2 · utility

Assignee

• mCube, Inc. · US

Inventors

• Shingo Yoneoka · Cupertino, US
• Sudheer S. Sridharamurthy · San Jose, US
• Wenhua Zhang · Suzhou, CN
• Te-Hsi Lee · San Jose, US

Key dates

• Filing date: Jun 5, 2014
• Grant date: Jul 7, 2015
• Expiry date: Jun 5, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0865
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An integrated MEMS inertial sensor device. The device includes a MEMS inertial sensor overlying a CMOS substrate. The MEMS inertial sensor includes a drive frame coupled to the surface region via at least one drive spring, a sense mass coupled to the drive frame via at least a sense spring, and a sense electrode disposed underlying the sense mass. The device also includes at least one pair of quadrature cancellation electrodes disposed within a vicinity of the sense electrode, wherein each pair includes an N-electrode and a P-electrode.