Pressure control device, flow rate control device and recording medium having programs used for pressure control device, recording medium having programs used for flow rate control device
US9075414B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 3, 2013 |
| Grant date | Jul 7, 2015 |
| Priority date | — |
| Expiry date | Jan 23, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7759
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
To provide a pressure control device that can prevent ringing and overshoot without changing gain even with a high gain setting, can quickly change pressure to a steady state even with a large set pressure value, and can equalize the time required from an initial to steady state regardless of the set pressure value, a valve control part is provided that includes an open degree operated amount output part that outputs an open degree operated amount based on a measured pressure value and a set pressure value, and a limiter part that sets an upper limit value of the open degree operated amount according to the set pressure value and that controls a pressure control valve by the open degree operated amount of the upper limit value when the open degree operated amount exceeds the upper limit value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.