Indirectly heated cathode cartridge design
US9076625B2 · kind B2 · utility
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14References
19Claims
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Inventors
Key dates
| Filing date | Apr 8, 2011 |
| Grant date | Jul 7, 2015 |
| Priority date | — |
| Expiry date | Oct 8, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/06375
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for producing electrons in a plasma flood gun is disclosed. The apparatus includes an indirectly heated cathode (IHC) which is contained within a pre-fabricated cartridge. This cartridge can be readily replaced in a plasma flood gun. In addition, the use of an IHC reduces the amount of contaminants that are injected into the workpiece or wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.