Anchoring structure and intermeshing structure

US9076821B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Erwin Vogl · Hallbergmoos, DE
• Markus Zundel · Egmating, DE

Key dates

• Filing date: Feb 22, 2012
• Grant date: Jul 7, 2015
• Expiry date: May 4, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D64/519
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An anchoring structure for a metal structure of a semiconductor device includes an anchoring recess structure having at least one overhanging side wall, the metal structure being at least partly arranged within the anchoring recess structure.