Transfer unit, method for controlling the transfer unit, and apparatus and method for treating substrate using the transfer unit
US9079304B2 · kind B2 · utility
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24Claims
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Key dates
| Filing date | Oct 29, 2013 |
| Grant date | Jul 14, 2015 |
| Priority date | — |
| Expiry date | Feb 27, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Provided is a transfer unit. The transfer unit includes a robot transferring a substrate and a controller controlling a speed of the robot according to the number of substrates to be transferred by the robot for a preset period. When the number of substrates to be transferred for the preset period increases, the robot increases in moving speed by the controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.