Leveling apparatus and atomic force microscope including the same
US9081272B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 2, 2014 |
| Grant date | Jul 14, 2015 |
| Priority date | — |
| Expiry date | Apr 2, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/2049
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a leveling apparatus that levels an object to be leveled with a surface of a substrate by measuring the force applied to the object, and an atomic force microscope including the leveling apparatus.A leveling apparatus according to the present invention, which levels an object with a substrate such that one side of the object is brought in parallel contact with the surface of the substrate, includes: force sensors disposed to measure force at at least three points on the other side of the object; an angle adjusting unit disposed to adjust the angle between the object and the surface of the substrate; and a controller connecting with the force sensors and the angle adjusting unit to drive the angle adjusting unit on the basis of data from the force sensors. The controller obtains the data on force applied to the force sensors by bringing one side of the object in contact with the surface of the substrate at a predetermined angle, calculates the degree of relative inclination between the object and the surface of the substrate from the data on force, and levels the object with the surface of the substrate by adjusting the angle of the object or the sub…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.