Evacuation system alerts based on process tool systems bus monitoring
US9081379B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2012 |
| Grant date | Jul 14, 2015 |
| Priority date | — |
| Expiry date | Jun 13, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/80
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
In a method of controlling operation of a processing system, a host computer, a process tool and a component of an evacuation system, for example an abatement tool, are connected to a system bus. The abatement tool monitors signals transmitted on the system bus between the host computer and the process tool, and signals received directly from the process tool. The abatement tool uses information contained within the monitored signals to generate a signal for the process tool regarding an operating characteristic of the abatement tool. This signal is transmitted either directly or over the system bus to the process tool, which uses the generated signal to control an operating state of the process tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.