Flow rate control device
US9081388B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 23, 2010 |
| Grant date | Jul 14, 2015 |
| Priority date | — |
| Expiry date | Jan 6, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow controller comprises a flow rate measuring part that measures a flow rate of a fluid flowing in a flow channel and outputs a measured flow rate value, a control valve, a valve control part that controls an opening degree of the control valve based on an entirely-close command to entirely close the control valve compulsorily or a set flow rate value set as a target value, and an external output part that outputs an external output flow rate value based on the measured flow rate value to the outside, and at a time when the valve control part receives the entirely close command or zero as the set flow rate value, the external output part outputs zero as the external output flow rate value, irrespective of the measured flow rate value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.