Patent · US Active

Display element manufacturing method and manufacturing apparatus

US9086585B2 · kind B2 · utility

64Cited by
1References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 27, 2010
Grant dateJul 21, 2015
Priority date
Expiry dateMar 5, 2034

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10K2102/311
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

The display element manufacturing apparatus has a transporting part, which transports a substrate in a first direction, a first alignment system, which detects fiducial marks, a second alignment system, which is arranged at a prescribed distance from the first alignment system in the first direction and detects fiducial marks, calculating parts, which detect the fiducial marks and calculate the expansion/contraction of the substrate in the first direction or the transport speed of the substrate, and a processing part, which processes a prescribed position of the substrate based on at least one of the expansion/contraction of the substrate in the first direction or the transport speed of the substrate and the fiducial marks.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.