Non-volatile memory devices with non-uniform floating gate coupling
US9087734B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2011 |
| Grant date | Jul 21, 2015 |
| Priority date | — |
| Expiry date | Dec 19, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B41/10
Abstract
A memory device includes a substrate having an active region defined therein that extends linearly along a first direction. The device also includes a select line on the substrate and extending along a second direction to perpendicularly cross the active region, first and second floating gate patterns on the active region and spaced apart along the first direction, and first and second dielectric patterns on respective ones of the first and second floating gate patterns. The device further includes first and second word lines on respective ones of the first and second dielectric patterns and extending in parallel with the select line along the first direction. A first area of overlap of the first word line with the first floating gate pattern and the first dielectric pattern is less than a second area of overlap of the second word line with the second floating gate pattern and the second dielectric pattern. The first word line may be disposed between the select line and the second word line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.