Optical writer for flexible foils

US9090095B2 · kind B2 · utility

Assignee

• MICRONIC MYDATA AB · SE

Inventors

• Torbjorn Sandstrom · Mölnlycke, SE
• Carl During · Spånga, SE

Key dates

• Filing date: Jun 4, 2013
• Grant date: Jul 28, 2015
• Expiry date: Jun 4, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F9/00
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The technology disclosed relates to patterning of flexible substrate. One implementation can be applied for production of flexible displays and other electronic devices on flexible substrates. The substrate may be plastic film typically 50-150 microns thick and the size of the pattern features may typically be in the range 1-10 microns across. Larger and smaller structures are possible. The patterning is done by means of optical exposure, either by exposure of a photosensitive resist or lacquer, or by other thermal or photochemical interaction between the light and the substrate. The substrate may typically be loaded as a roll and after exposure and other processing it may be rolled up on a second output roll, so called roll-to-roll (R-to-R) processing.