Photoresist delivery system including control valve and associated methods
US9091924B2 · kind B2 · utility
6Cited by
20References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 24, 2012 |
| Grant date | Jul 28, 2015 |
| Priority date | — |
| Expiry date | Jun 14, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6715
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A photoresist delivery system includes a photoresist pump, a photoresist reservoir coupled to the photoresist pump, and a photoresist container. A control valve is between the photoresist reservoir and the photoresist container and is movable from a closed position to an open position upon engagement of the photoresist container with the photoresist reservoir to replenish photoresist therein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.