Microscope and method for detecting sample light

US9097889B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Thomas Kalkbrenner · Jena, DE
• Ralf Wolleschensky · Jena, DE

Key dates

• Filing date: Mar 17, 2011
• Grant date: Aug 4, 2015
• Expiry date: Dec 24, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/06
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Microscope and method for detecting sample light, having at least one illuminating beam which is partially phase-modulated with a modulation frequency along the cross section thereof and a microscope objective for intensity-modulated focusing of the illuminating beam into a sample. The microscope has a detection beam path that has at least one demodulator. At least one electro-optical modulator (EOM) is used for phase modulation of at least a part, preferably half, of the illuminating beam, or different portions or halves of the illuminating beam are modulated differently, preferably anti-phase, by anti-phase control of piezoelectric elements, or acousto-optical modulators for splitting into a plurality of partial beam paths. Optic elements are provided for partial phase modulation of the excitation beam. Actuating elements are provided for setting the phase difference, or at least one optic modulator, preferably an acousto-optical modulator (AOM) is used for demodulation in the detection, or a change in the mode of operation of the detectors for demodulation takes place. In the case of foci distribution, produced for example by a spinning micro-lens disc or multi-spot generation, …