Method of removing damaged epoxy from electrostatic chuck
US9105676B2 · kind B2 · utility
2Cited by
1References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2012 |
| Grant date | Aug 11, 2015 |
| Priority date | — |
| Expiry date | Jan 18, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B7/0071
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method of removing an epoxy band from an electrostatic chuck includes securing the electrostatic chuck in a servicing fixture, applying a thermal source to the epoxy band to breakdown a plurality of adhesive bonds securing the epoxy band to the electrostatic chuck, forming a hole in the epoxy band and pulling the epoxy band from the electrostatic chuck. A system for removing an epoxy band from an electrostatic chuck is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.