Patent · US Active

Process for forming a crack in a material

US9105688B2 · kind B2 · utility

1Cited by
2References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 27, 2012
Grant dateAug 11, 2015
Priority date
Expiry dateApr 27, 2032

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/76254
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A process for forming a layer (26) of semiconductor material from a substrate (20), or donor substrate, made of the same semiconductor material is described, comprising:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.