Acoustic wave device including a surface wave filter and a bulk wave filter, and method for making same
US9106199B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 4, 2010 |
| Grant date | Aug 11, 2015 |
| Priority date | — |
| Expiry date | Nov 18, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic wave device comprising at least one surface acoustic wave filter and one bulk acoustic wave filter, the device including, on a substrate comprising a second piezoelectric material: a stack of layers including a first metal layer and a layer of a first monocrystalline piezoelectric material, wherein the stack of layers is partially etched so as to define a first area in which the first and second piezoelectric materials are present and a second area in which the first piezoelectric material is absent; a second metallization at the first area for defining the bulk acoustic wave filter integrating the first piezoelectric material, and a third metallization at the second area for defining the surface acoustic wave filter integrating the second piezoelectric material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.