Solution processing apparatus, solution processing method, and non-transitory computer-readable recording medium
US9109934B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 17, 2013 |
| Grant date | Aug 18, 2015 |
| Priority date | — |
| Expiry date | Jul 22, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C11/1013
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
According to an embodiment of the present disclosure, an apparatus is configured to perform a solution process by supplying a processing solution from a processing solution supply source to the substrate held on a substrate holder via a flow path member and a nozzle at a flow rate equal to or less than 1 mL/sec. The apparatus includes a solution transfer unit configured to transfer the processing solution to the nozzle, and mounted to the flow path member, and an ultrasonic flowmeter mounted to the flow path member at a downstream side from the solution transfer unit. In this embodiment, a lower limit of a flow rate range which is measured by the ultrasonic flowmeter is equal to or less than 1 mL/sec.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.