Substrate loader and unloader having an air bearing support
US9117856B2 · kind B2 · utility
3Cited by
22References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2011 |
| Grant date | Aug 25, 2015 |
| Priority date | — |
| Expiry date | Mar 12, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68785
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate separation chuck which is adapted to separate a substrate from an adhering surface. The substrate separation chuck has a support adapted to support the adhering surface. An air bearing surface is adapted to support the substrate, the air bearing surface axially moveable relative to the support. The air bearing surface has a first position adjacent the substrate with the substrate coupled to the adhering surface. The air bearing surface is moveable from the first position to a second position separating the substrate from the adhering surface without contact between the substrate and the air bearing surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.