Dielectric layer for electrostatic chuck and electrostatic chuck
US9120704B2 · kind B2 · utility
1Cited by
4References
10Claims
0Family size
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Key dates
| Filing date | Oct 15, 2013 |
| Grant date | Sep 1, 2015 |
| Priority date | — |
| Expiry date | Oct 19, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (Ω·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.