Patent · US Active

Surface treatments for alignment of block copolymers

US9120947B2 · kind B2 · utility

1Cited by

1References

13Claims

0Family size

Assignee

The Board of Regents of the University of Texas System · US

Inventors

C. Grant Willson · Austin, US
Christopher M. Bates · Austin, US
Jeffrey Strahan · Austin, US
Christopher John Ellison · Austin, US

Key dates

Filing date	Mar 17, 2011
Grant date	Sep 1, 2015
Priority date	—
Expiry date	Aug 13, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/31938
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The present invention relates to a method the synthesis and utilization of random, cross-linked, substituted polystyrene copolymers as polymeric cross-linked surface treatments (PXSTs) to control the orientation of physical features of a block copolymer deposited over the first copolymer. Such methods have many uses including multiple applications in the semiconductor industry including production of templates for nanoimprint lithography.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.