Patent · US Active

Microscope with retain focus control

US9128296B2 · kind B2 · utility

3Cited by
2References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 4, 2009
Grant dateSep 8, 2015
Priority date
Expiry dateApr 2, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06V20/69
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A microscope including an imaging optical unit, a sample stage for supporting a sample to be examined, a movement unit, by which the distance between sample stage and imaging optical unit can be altered, a focus measuring unit, which measures the present focus position and outputs a focus measurement signal, a control unit for maintaining a predetermined focus position for examinations of the sample that are separated from one another in time. The control unit receives the focus measurement signal and derives a deviation of the present focus position from the predetermined focus position. Dependent on the deviation derived the movement unit, changes the distance between sample stage and imaging optical unit so that the predetermined focus position is maintained. The control unit drives the movement unit (9) for maintaining the predetermined focus position only before and/or after at least one of the examinations, but never during the examinations.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.