Electrically- and chemically-active adlayers for plasma electrodes
US9133546B1 · kind B1 · utility
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9References
29Claims
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Key dates
| Filing date | Mar 5, 2014 |
| Grant date | Sep 15, 2015 |
| Priority date | — |
| Expiry date | Mar 16, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3277
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system for forming a thin film on a substrate uses a plasma to activate at least one gaseous precursor in a plasma generator fluidly coupled with a reaction space. The plasma generator is operative to generate a plasma from at least a portion of the precursor gas with at least one pair of plasma electrodes, one plasma electrode having a non-native electrically conductive adlayer exhibiting property characteristics that cause the adlayer to be substantially conserved and chemically active with at least one of the gases present within the plasma generation region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.