Method for fabricating a magnetic write pole using vacuum deposition
US9135930B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 10, 2014 |
| Grant date | Sep 15, 2015 |
| Priority date | — |
| Expiry date | Jun 10, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/3163
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method and system provide a magnetic transducer having an air-bearing surface (ABS) and an intermediate layer. A trench having a shape and location corresponding to a main pole is formed in the intermediate layer. The main pole is provided. At least a portion of the main pole is in the trench. Providing the main pole further includes vacuum depositing a first main pole material layer. The first main pole material layer is thin enough to preclude filling of the trench. The first main pole material layer is then ion beam etched. A second main pole layer is vacuum deposited on the first main pole layer. The second main pole material layer is also thin enough to preclude filling of the trench. An additional main pole layer is also deposited.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.