Vacuum pumping system
US9140250B2 · kind B2 · utility
0Cited by
6References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 25, 2011 |
| Grant date | Sep 22, 2015 |
| Priority date | — |
| Expiry date | Jan 25, 2032 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C2240/70
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a vacuum pumping system (18) for evacuating gas from a plurality of chambers (12, 14, 16) at different pressures. The pumping system comprises a plurality of compound vacuum pumps (20, 22), wherein each compound pump comprises a plurality of pumping mechanisms (24,26,28) connected in series between a pump inlet (30) and a pump exhaust (32) and an interstage port (34, 36) between pumping mechanisms in the series. The system is configured such that gas evacuated from one of said chambers is pumped through the interstage ports of at least two of said compound pumps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.